Piezo Stack Manipulators
- Sub-nanometer resolution
- High force
- Fast response
Nanomanipulator & Micromanipulator Components:
Piezo and Classical Mechanisms
PI provides ultra-precision piezo manipulators, piezo motor actuators, flexure-guided mechanisms, and motorized positioning components for micro- and nano-manipulation. These technologies support applications that require high stiffness, smooth motion, fast response, and positioning resolution down to the nanometer and sub-nanometer range.
Applications of Nanomanipulators
Nanomanipulators are essential tools wherever ultra-precise positioning, alignment, and interaction at the micro- and nanoscale are required. In semiconductor manufacturing, they are used for wafer probing, failure analysis, inspection, and mask alignment, enabling repeatable positioning with nanometer accuracy. In photonics and fiber optics, Nanomanipulators support active alignment of optical fibers, laser diodes, lenses, and photonic integrated circuits, improving coupling efficiency and production yield.
In life sciences, Nanomanipulators are widely applied in cell biology and electrophysiology for microinjection, patch clamping, and single-cell manipulation. Their high resolution and smooth motion allow controlled interaction with delicate biological structures. In microscopy, especially scanning probe microscopy such as AFM and STM, Nanomanipulators provide precise probe positioning and scanning for surface characterization at atomic resolution. If manipulation in all 6 degrees of freedom is required, 6-axis robotic manipulators such as hexapods are solutions to consider.
Additional applications include nanofabrication, nanoimprint lithography, micro-assembly, aerospace research, and experiments in vacuum or non-magnetic environments. Across these fields, piezo-driven nanopositioning systems offer fast response, high stiffness, and exceptional stability, making them a key enabling technology for advanced research and industrial production. More information on precision nano-transducers for medical and industrial applications.
Piezo Stack Manipulators
Piezo Motor Manipulators
- High speed
- Non-magnetic drive principle
- Long travel ranges
Motorized Manipulators
- Translation stages
- Lead screw actuators
- Micrometer-style motion
Nanomanipulator Motors
- Millimeter travel
- Picometer-class resolution
- Auto-locking at rest
Flextensional Actuator Manipulators
- Picometer resolution
- Fast response
- Precision guidance
PI is a leading manufacturer of ultra-precision piezo manipulators and motion components for demanding research, OEM, and industrial applications.
NEXACT® Nanomanipulator Actuators
Compact Piezo-Motor Nanomanipulator
- 20 mm standard travel range with flexible runner length
- Compact and cost-effective design
- 0.03 nm resolution and up to 10 N push / pull force
- Low operating voltage
- Self-locking at rest, no heat dissipation, nanometer stability
- Non-magnetic and vacuum-compatible working principle
Vacuum Compatible Linear Nanomanipulator
- Feed force 22N
- Step size 20 nanometers
- Travel range 7mm to 13mm
- Compact design
- Holding force 100N
- Lifetime >50,000,000 steps
Piezo-Motor® Nanomanipulator Actuators
Compact High-Force Ceramic Motor Linear Nanomanipulator
- Winner of the SEMI Technology Innovation Showcase Award
- 3 mm travel range
- <0.1 nanometer resolution
- Active force generation up to 30 N
- >50 N holding force, self-locking
- Non-magnetic option
High-Force Piezo Nanomanipulator
- 20 mm travel range
- Resolution down to 0.03 nm
- Open-loop and closed-loop operation
- Up to 800 N holding force
- Self-locking at rest
- Non-magnetic and vacuum-compatible working principle
- Cleanroom compatible
How Nanomanipulators Differ from Micromanipulators
Nanomanipulators and micromanipulators are both used for precision positioning, but they operate at different performance levels. Micromanipulators typically provide micron-scale motion for tasks such as probe placement, sample handling, and optical adjustment. Nanomanipulators go further, delivering nanometer or even sub-nanometer resolution for applications where extremely small movements affect results. They often use piezo actuators, flexure guidance, high-resolution sensors, and low-noise controllers to minimize backlash, friction, and drift. Nanomanipulators are used in nanotechnology, microscopy, semiconductor inspection, photonics alignment, and materials research, where positioning accuracy, stability, and repeatability are more critical than simple travel range. Nanomanipulators are similar to nano-precison actuators, however, nanomanipulators usually have shorter travel ranges than some nano-precision actuators.